Download PDF by Fred Roozeboom (auth.), Fred Roozeboom (eds.): Advances in Rapid Thermal and Integrated Processing

By Fred Roozeboom (auth.), Fred Roozeboom (eds.)

ISBN-10: 9048146968

ISBN-13: 9789048146963

ISBN-10: 9401587116

ISBN-13: 9789401587112

Rapid thermal and built-in processing is an rising single-wafer expertise in ULSI semiconductor production, electric engineering, utilized physics and fabrics technology. right here, the physics and engineering of this expertise are mentioned on the graduate point. 3 interrelated components are lined. First, the thermophysics of photon-induced annealing of semiconductor and similar fabrics, together with primary pyrometry and emissivity matters, the modelling of reactor designs and strategies, and their relation to temperature uniformity. moment, procedure integration, treating the advances in easy apparatus layout, scale-up, built-in cluster-tool gear, together with wafer cleansing and built-in processing. 3rd, the deposition and processing of skinny epitaxial, dielectric and steel movies, protecting selective deposition and epitaxy, built-in processing of layer stacks, and new parts of strength software, resembling the processing of III-V semiconductor constructions and skinny- movie head processing for high-density magnetic facts storage.

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Extra info for Advances in Rapid Thermal and Integrated Processing

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1 BLACKBODY RADIATION The spectrum of radiation emitted from a blackbody is described by the Planck radiation function, 37 Cl Wbb (It, T) =It -5~(e-x-p(-C2 / itT) - 1) , Wbb(A,T) (Wm- 2 /lm- 1) 106 , , , , , , '" , , where Wbb(A,T) is known as the spectral , , , '" 105 / 104 I 10 10 2 1 ~ 1011 / I 3L I I, I / / " ,I .. , " ~ -- - -2000°C' 1000 C 0 - " (1) -400°C radiant exitance, and describes the power per unit area and wavelength radiated into the forward hemisphere from a blackbody at the absolute temperature T in K, at the wavelength A in /lm [51].

Am. 64, 339 (1974). 52. A. Gouffe, Revue d'optique 24, 1 (1945). 53. C. Lee and G. Chizinsky, Solid St. Technol. 32 (1), 43 (1989). 54. C. S. Patent 4857689 (15 Aug. 1989). 55. M. Camm and B. Lojek, Proc. 2nd Int. RTP Conference, RTP'94, Aug. 31-Sept. 2, 1994, Monterey, California, USA, p. 259. 56. E. Miner, C. Gronet, B. Peuse and J. Grilli, Proc. 2nd Int. RTP Conference, RTP'94, Aug. 31-Sept. 2, 1994, Monterey, California, USA, p. 94. 57. M. E. Miner, European Patent 612862 (31 Aug. 1994). 58.

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Advances in Rapid Thermal and Integrated Processing by Fred Roozeboom (auth.), Fred Roozeboom (eds.)


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